LOW-TEMPERATURE DEPOSITION OF HEXAGONAL BN FILMS BY CHEMICAL VAPOR-DEPOSITION

被引：64

作者：

MOTOJIMA, S

TAMURA, Y

SUGIYAMA, K

机构：

来源：

THIN SOLID FILMS | 1982年 / 88卷 / 03期

关键词：

D O I：

10.1016/0040-6090(82)90056-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：269 / 274

页数：6

共 12 条

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[8] CHEMICAL VAPOR-DEPOSITION OF HEXAGONAL BORON-NITRIDE THICK-FILM ON IRON [J].

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