Epitaxial growth at PZT/Ir interface

被引：13

作者：

Okuwada, K ^{[1
]}

Yoshida, K

Saitou, T

Sawabe, A

机构：

[1] Toshiba Corp, Proc & Mfg Engn Ctr, Yokohama, Kanagawa 2358522, Japan

[2] Aoyama Gakuin Univ, Dept Elect Engn & Elect, Setagaya Ku, Tokyo 1578572, Japan

来源：

JOURNAL OF MATERIALS RESEARCH | 2000年 / 15卷 / 12期

关键词：

D O I：

10.1557/JMR.2000.0383

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Surface oxidation of an iridium film and the possibility of epitaxial growth of PZT spin-coated film on sputtered iridium were investigated. The free surface on the iridium film oxidized over 400 degreesC with random orientation. Nevertheless, both the PZT(111)/Ir(111) and PZT(100)/Ir(100) interfaces were realized using the highly oriented iridium layer. These results suggest that PZT nucleation has priority over iridium surface oxidation.

引用

页码：2667 / 2671

页数：5

共 6 条

[1] PREPARATION OF PB(ZR,TI)O-3 THIN-FILMS ON IR AND IRO2 ELECTRODES [J].

NAKAMURA, T ;

NAKAO, Y ;

KAMISAWA, A ;

TAKASU, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (9B) :5207-5210

[2] HIGH-RESOLUTION ELECTRON-MICROSCOPY ON EPITAXIAL PB(MG1/3NB2/3)O3 FILM PREPARED BY SOL-GEL METHOD [J].

OKUWADA, K ;

NAKAMURA, S ;

IMAI, M ;

KAKUNO, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1991, 30 (6A) :L1052-L1055

[3] PEROVSKITE FORMATION OF PB(MG1/3NB2/3)O3 AND PB(FE1/2NB1/2)O3 FILM BY SOL-GEL METHOD [J].

OKUWADA, K ;

NAKAMURA, S ;

IMAI, M ;

KAKUNO, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 (06) :1153-1156

[4]

OKUWADA K, 1991, CERAMIC T, V22, P713

[5] XPS INVESTIGATION OF SURFACE OXIDATION LAYERS ON A PLATINUM-ELECTRODE IN ALKALINE-SOLUTION [J].

PEUCKERT, M .

ELECTROCHIMICA ACTA, 1984, 29 (10) :1315-1320

[6] Elucidation of the switching processes in tetragonal PZT by hysteresis loop and impedance analysis [J].

Wouters, DJ ;

Willems, G ;

Lee, EG ;

Maes, HE .

INTEGRATED FERROELECTRICS, 1997, 15 (1-4) :79-87

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