Growth of ZnO tetrapods for nanostructure-based gas sensors

被引：170

作者：

Calestani, D. ^{[1
]}

Zha, M. ^{[1
]}

Mosca, R. ^{[1
]}

Zappettini, A. ^{[1
]}

Carotta, M. C. ^{[2
,3
]}

Di Natale, V. ^{[2
,3
]}

Zanotti, L. ^{[1
]}

机构：

[1] IMEM CNR, I-43100 Parma, Italy

[2] Univ Ferrara, CNR, INFM, I-44100 Ferrara, Italy

[3] Univ Ferrara, Dipartimento Fis, I-44100 Ferrara, Italy

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2010年 / 144卷 / 02期

关键词：

ZnO; Tetrapods; Nanomaterials; Semiconductor oxides; Chemoresistive gas sensors; H2S; ETHANOL-SENSING CHARACTERISTICS; CHEMICAL SENSORS; OXIDE; FABRICATION; NANORODS; SENSITIVITY; PROPERTY; HUMIDITY; DEFECTS; ARRAYS;

D O I：

10.1016/j.snb.2009.11.009

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Standard vapour phase growth process for ZnO tetrapods has been optimized in order to reach a very large yield, a good reproducibility and a single morphology (tetrapods are separated from the other possible ZnO nanostructures). The large yield of the growth and the simple deposition of these nanostructures on an alumina substrate with contacts and heater, allowed us to realize gas sensor prototypes with a relatively low-cost procedure. The obtained ZnO tetrapods-based gas sensors have been tested with different gases (CH3CH2OH, NO2, CO and H2S) and, especially, response values S = 25 and S = 100 have been measured towards 1 ppm and 5 ppm of hydrogen sulphide, respectively. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：472 / 478

页数：7

共 67 条

[1] Optimization of the electrical properties of magnetron sputtered aluminum-doped zinc oxide films for opto-electronic applications [J].