Micro-patterning in anodic oxide film on aluminium by laser irradiation

被引：24

作者：

Jha, H. ^{[1
]}

Kikuchi, T. ^{[1
]}

Sakairi, M. ^{[1
]}

Takahashi, H. ^{[1
]}

机构：

[1] Hokkaido Univ, Div Mat Sci, Lab Interface Microstruct Anal, Kita Ku, Sapporo, Hokkaido 0608628, Japan

来源：

ELECTROCHIMICA ACTA | 2007年 / 52卷 / 14期

关键词：

anodizing; pore sealing; laser patterning; microchannel; mu-TAS; MEMS;

D O I：

10.1016/j.electacta.2007.01.008

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Microstructures such as microchannels and microchambers were fabricated on anodic oxide film of aluminium with laser direct patterning technique. The aluminium substrate covered with porous type anodic oxide film was dyed with organic dyes followed by hydrothermal treatment. The coloured and pore sealed film shows much higher absorption then as-formed porous film, that makes possible to pattern various types of microstructures on the film by removing the upper part of the film surface by laser irradiation. Structure of the crystallized hydroxide layer on the surface of the anodic oxide film, formed during pore sealing, as well as the partial removal of anodic oxide film from the surface is described. Microstructures with depth lower than 1-27 mu m were patterned successfully on 16 and 32 mu m thick anodic oxide film surfaces, using various combinations of laser power and laser scanning speed. The affect of the laser scanning speed and laser power density on the shape of the microstructures is also explained. (c) 2007 Elsevier Ltd. All rights reserved.

引用

页码：4724 / 4733

页数：10

共 30 条

[1] Local deposition of polypyrrole on aluminum by anodizing, laser irradiation, and electrolytic polymerization and its application to the fabrication of micro-actuators [J].