A traceable calibration procedure for MEMS-based load cells

被引：8

作者：

Abbas K. ^{[1
]}

Leseman Z.C. ^{[1
]}

MacKin T.J. ^{[2
]}

机构：

[1] Department of Mechanical Engineering, University of New Mexico, MSC01-1150, Albuquerque

[2] Department of Mechanical Engineering, Cal Poly, San Luis Obispo, CA

来源：

International Journal of Mechanics and Materials in Design | 2008年 / 4卷 / 4期

关键词：

Calibration; Load cell; MEMS; Metrology;

D O I：

10.1007/s10999-008-9069-z

中图分类号：

学科分类号：

摘要：

Characterizing the mechanical properties of materials and biological systems at the nanoscale requires accurate measurement of forces on the order of μN and less. Due to the scale of the measurements and size of the instrumentation, calibration of nanoscale devices presents a new challenge in metrology. In order to ensure accuracy of results, traceable calibrations must be performed on nanoscale instrumentation. Our group recently developed a novel MEMS-based high resolution load cell with force resolution on the order of μN. This paper reports on a simple method for traceably calibrating our device using dead weights that could be generalized to other MEMS-based load cells. In this article, fabrication of a MEMS load cell is detailed and we compare our calibrated force-displacement curves to a non-linear theoretical prediction, revealing errors as great as 29%. © 2008 Springer Science+Business Media, LLC.

引用

页码：383 / 389

页数：6

共 14 条

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