SPONTANEOUS HYDROGENATION OF TI FILMS EVAPORATED ON NACL SUBSTRATES .1.

被引：18

作者：

YAMADA, Y ^{[1
]}

KASUKABE, Y ^{[1
]}

NAGATA, S ^{[1
]}

YAMAGUCHI, S ^{[1
]}

机构：

[1] TOHOKU UNIV, INST MAT RES, SENDAI, MIYAGI 980, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1990年 / 29卷 / 10期

关键词：

Depth profiles of hydrogen; Elastic recoil detection analysis; Evolution of hydrogen; NaCI substrate; Ti-evaporated films; TiH[!sub]x[!/sub;

D O I：

10.1143/JJAP.29.L1888

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The depth profiles of hydrogen concentration in Ti-evaporated films on NaCl substrates have been measured with the elastic recoil detection analysis technique using a 2.7 MeV 4He+beam. It has been revealed that the Ti film absorbs hydrogen escaped from the substrate. The hydrogen concentration in the film decreased with increasing substrate temperature. It is pointed out that the epitaxial growth of substances with a great affinity for hydrogen, evaporated on NaCl or deliquescent alkali halide substrates, should be re-examined from the point of view of hydrogenation on the substrate. © 1990 IOP Publishing Ltd.

引用

页码：L1888 / L1891

页数：4