ELECTRONIC CONDUCTION CHARACTERISTICS OF SOL-GEL FERROELECTRIC PB(ZR0.4TI0.6)O-3 THIN-FILM CAPACITORS .2.

被引:35
作者
MIHARA, T
WATANABE, H
机构
[1] Applied Research Department, Corporate Research Division, Olympus Optical Co. Ltd., Hachioji-shi Tokyo
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1995年 / 34卷 / 10期
关键词
FERROELECTRICS; THIN FILM; PZT; CONDUCTIVITY; DC STRESS; HYSTERESIS LOOPS; LEAKAGE CURRENT; SPACE CHARGE; CONDUCTION MECHANISM; TRAPPING; DETRAPPING;
D O I
10.1143/JJAP.34.5674
中图分类号
O59 [应用物理学];
学科分类号
摘要
We studied the electronic conduction characteristics of sol gel ferroelectric Pb(Zr0.4Ti0.6)O-3 thin-film capacitors by evaluation of time-dependent leakage current (I-t) and current voltage (I-V) characteristics along with other dielectric properties. We derived an experimental formula to explain the leakage current at low field as a function of electric field, time and temperature. The ohmic-like current at low field depended on both the amount of excess Pb and thickness, which might be explained by the leakage current being governed by the amount of ionized point defects with an activation energy of about 0.5 eV. The ohmic-like current which uas decreased after DC stressing reverted back to its original value during the recovery time at high temperature. The 50% recovery time had an activation energy of 0.53 eV. We proposed a plausible conduction model governed by trapping into ionized point defects.
引用
收藏
页码:5674 / 5682
页数:9
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