MASKLESS, CHEMICAL ETCHING OF SUBMICROMETER GRATINGS IN SINGLE-CRYSTALLINE GAAS

被引：40

作者：

PODLESNIK, DV

GILGEN, HH

OSGOOD, RM

SANCHEZ, A

机构：

[1] MIT,LINCOLN LAB,LEXINGTON,MA 02173

[2] COLUMBIA UNIV,COLUMBIA RADIAT LAB,NEW YORK,NY 10027

来源：

APPLIED PHYSICS LETTERS | 1983年 / 43卷 / 12期

关键词：

D O I：

10.1063/1.94250

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1083 / 1085

页数：3

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