Improved atomic force microscopy imaging using carbon-coated probe tips

被引：18

作者：

Doris, BB

Hegde, RI

机构：

[1] Advanced Products Research and Development Laboratory, Motorola, Austin, TX 78721

来源：

APPLIED PHYSICS LETTERS | 1995年 / 67卷 / 25期

关键词：

D O I：

10.1063/1.115393

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Atomic force microscopy (AFM) images using carbon-coated probe tips are presented for hydrogen-passivated Si and SiO2 surfaces. Tapping mode measurements on these surfaces demonstrate that the image quality and probe tip wear characteristics are dramatically improved for scans performed with the carbon coated tips. The reasons for the improved quality of AFM imaging and reduced tip damage are discussed. (C) 1995 American Institute of Physics.

引用

页码：3816 / 3818

页数：3

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