AL2O3 FILMS FOR INTEGRATED-OPTICS

被引：96

作者：

SMIT, MK ^{[1
]}

ACKET, GA ^{[1
]}

VANDERLAAN, CJ ^{[1
]}

机构：

[1] DELFT UNIV TECHNOL,DEPT TECH PHYS,OPT LAB,DELFT,NETHERLANDS

来源：

THIN SOLID FILMS | 1986年 / 138卷 / 02期

关键词：

ALUMINUM COMPOUNDS - Thin Films - FILMS - Mechanical Properties;

D O I：

10.1016/0040-6090(86)90391-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The optical and chemo-mechanical properties of deposited Al//2O//3 films are markedly dependent on the deposition conditions. The refractive indices may range from as low as 1. 54 up to 1. 70. Very stable films were produced by rf sputtering from an Al//2O//3 target without bias. The optical attenuation was reduced from 25 to 1 db cm** minus **1 by thermal annealing at 800 degree C for 1 h. Some results for the attenuation, refractive index, deposition rates and stability of Al//2O//3 films are presented for rf-sputtered and electron-beam-evaporated films.

引用

页码：171 / 181

页数：11

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