REACTIVE DEPOSITION OF LOW-LOSS AL2O3 OPTICAL-WAVEGUIDES BY MODIFIED DC PLANAR MAGNETRON SPUTTERING

被引：58

作者：

ESTE, G

WESTWOOD, WD

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1984年 / 2卷 / 03期

关键词：

D O I：

10.1116/1.572502

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1238 / 1247

页数：10

共 19 条

[1] ANDERSON DB, 1978, IEEE SPECTRUM DEC, P22
[2] SOME CALCULATIONS OF THICKNESS DISTRIBUTION OF FILMS DEPOSITED FROM LARGE AREA SPUTTERING SOURCES
GNAEDINGER, RJ
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (03): : 355 - +
[3] INVESTIGATION OF MIS STRUCTURES WITH AL2O3 INSULATION LAYERS OBTAINED BY DC REACTIVE SPUTTERING
KIROV, KI
ATANASOVA, ED
IVANOV, NA
[J]. THIN SOLID FILMS, 1977, 41 (02) : L21 - L23
[4] REFRACTION AND DISPERSION OF SYNTHETIC SAPPHIRE
MALITSON, IH
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1962, 52 (12) : 1377 - &
[5] TRANSPARENT CONDUCTING ZINC-OXIDE AND INDIUM TIN OXIDE-FILMS PREPARED BY MODIFIED REACTIVE PLANAR MAGNETRON SPUTTERING
MANIV, S
MINER, CJ
WESTWOOD, WD
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (03): : 1370 - 1375
[6] DISCHARGE CHARACTERISTICS FOR MAGNETRON SPUTTERING OF AL IN AR AND AR-O-2 MIXTURES
MANIV, S
WESTWOOD, WD
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (03): : 743 - 751
[7] HIGH-RATE DEPOSITION OF TRANSPARENT CONDUCTING FILMS BY MODIFIED REACTIVE PLANAR MAGNETRON SPUTTERING OF CD2SN ALLOY
MANIV, S
MINER, C
WESTWOOD, WD
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (02): : 195 - 198
[8] SURFACE OXIDATION-KINETICS OF SPUTTERING TARGETS
MANIV, S
WESTWOOD, WD
[J]. SURFACE SCIENCE, 1980, 100 (01) : 108 - 118
[9] PRESSURE AND ANGLE OF INCIDENCE EFFECTS IN REACTIVE PLANAR MAGNETRON SPUTTERED ZNO LAYERS
MANIV, S
WESTWOOD, WD
COLOMBINI, E
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (02): : 162 - 170
[10] PROPERTIES OF RF-SPUTTERED AL2O3 FILMS DEPOSITED BY PLANAR MAGNETRON
NOWICKI, RS
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01): : 127 - 133

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