HIGH-RATE DEPOSITION OF TRANSPARENT CONDUCTING FILMS BY MODIFIED REACTIVE PLANAR MAGNETRON SPUTTERING OF CD2SN ALLOY

被引：41

作者：

MANIV, S ^{[1
]}

MINER, C ^{[1
]}

WESTWOOD, WD ^{[1
]}

机构：

[1] BELL NO RES,OTTAWA K1Y 4H7,ONTARIO,CANADA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 02期

关键词：

D O I：

10.1116/1.570722

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：195 / 198

页数：4

相关论文

共 17 条

[1] OPTICAL-ABSORPTION EDGE IN CADMIUM STANNATE SELECTIVE COATINGS
AGNIHOTRI, OP
GUPTA, BK
SHARMA, AK
[J]. JOURNAL OF APPLIED PHYSICS, 1978, 49 (08) : 4540 - 4542
[2] POSITIVE-ION BOMBARDMENT OF SUBSTRATES IN RF DIODE GLOW-DISCHARGE SPUTTERING
COBURN, JW
KAY, E
[J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (12) : 4965 - 4971
[3] SPUTTER DEPOSITION AND CHARACTERIZATION OF CD2SNO4 FILMS
HAACKE, G
MEALMAKER, WE
SIEGEL, LA
[J]. THIN SOLID FILMS, 1978, 55 (01) : 67 - 81
[4] TRANSPARENT CONDUCTING COATINGS
HAACKE, G
[J]. ANNUAL REVIEW OF MATERIALS SCIENCE, 1977, 7 : 73 - 93
[5] HAACKE G, 1976, APPL PHYS LETT, V28, P622, DOI 10.1063/1.88589
[6] EVALUATION OF CADMIUM STANNATE FILMS FOR SOLAR HEAT COLLECTORS
HAACKE, G
[J]. APPLIED PHYSICS LETTERS, 1977, 30 (08) : 380 - 381
[7] Spray Deposition of Cadmium Stannate Films
Haacke, G.
Ando, H.
Mealmaker, W. E.
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (12) : 1923 - 1926
[8] PROPERTIES OF CADMIUM STANNATE THIN-FILM ELECTRODES AND THEIR USE IN PHOTOGALVANIC CELLS
HALL, D
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (05) : 804 - 807
[9] PROPERTIES OF CADMIUM STANNATE FILMS PREPARED BY RF SPUTTERING FROM POWDER TARGETS
LLOYD, P
[J]. THIN SOLID FILMS, 1977, 41 (01) : 113 - 120
[10] DISCHARGE CHARACTERISTICS FOR MAGNETRON SPUTTERING OF AL IN AR AND AR-O-2 MIXTURES
MANIV, S
WESTWOOD, WD
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (03): : 743 - 751