PROPERTIES OF CADMIUM STANNATE FILMS PREPARED BY RF SPUTTERING FROM POWDER TARGETS

被引:26
作者
LLOYD, P [1 ]
机构
[1] ROYAL SIGNALS & RADAR ESTAB,MALVEN WR14 3PS,WORCESTERSHIRE,ENGLAND
关键词
D O I
10.1016/0040-6090(77)90014-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:113 / 120
页数:8
相关论文
共 11 条
[1]  
[Anonymous], 1953, VACUUM, DOI DOI 10.1016/0042-207X(53)90411-4
[2]   DEVELOPMENTS AND TRENDS IN SPUTTERING DEPOSITION TECHNIQUES [J].
BESSOT, JJ .
THIN SOLID FILMS, 1976, 32 (01) :19-25
[3]  
BOSNELL JR, 1973, 1972 P ERA S LIQ CRY, P83
[4]   PROPERTIES OF SN-DOPED IN2O3 FILMS PREPARED BY RF SPUTTERING [J].
FAN, JCC ;
BACHNER, FJ .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (12) :1719-1725
[5]  
HOLLAND L, 1961, VACUUM DEPOSITION TH, P180
[6]  
KANE P, 1970, CHARACTERIZATION SEM, P93
[7]  
LLOYD P, 1976, Patent No. 70276
[8]  
LLOYD P, 1971, Patent No. 1399816
[9]   OPTICAL AND ELECTRICAL PROPERTIES OF CD2SNO4 - A DEFECT SEMICONDUCTOR [J].
NOZIK, AJ .
PHYSICAL REVIEW B, 1972, 6 (02) :453-&
[10]   THE SYSTEM CADMIUM OXIDE-STANNIC OXIDE [J].
SMITH, AJ .
ACTA CRYSTALLOGRAPHICA, 1960, 13 (10) :749-752