INVESTIGATION OF MIS STRUCTURES WITH AL2O3 INSULATION LAYERS OBTAINED BY DC REACTIVE SPUTTERING

被引:4
作者
KIROV, KI [1 ]
ATANASOVA, ED [1 ]
IVANOV, NA [1 ]
机构
[1] BULGARIAN ACAD SCI,INST SOLID STATE PHYS,1113 SOFIA,BULGARIA
关键词
D O I
10.1016/0040-6090(77)90388-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:L21 / L23
页数:3
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