OPTIMIZATION OF TIN OXIDE THIN-FILM PREPARATION VIA GAS-PHASE TRANSPORT

被引：25

作者：

MANIFACIER, JC ^{[1
]}

MURCIA, MD ^{[1
]}

FILLARD, JP ^{[1
]}

机构：

[1] UNIV SCI & TECH LANGUEDOC,CNRS,CTR ETUDES ELECTR SOLIDES,MONTPELLIER,FRANCE

来源：

MATERIALS RESEARCH BULLETIN | 1975年 / 10卷 / 11期

关键词：

D O I：

10.1016/0025-5408(75)90029-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：1215 / 1220

页数：6

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