CHARACTERIZATION OF ION-BEAM MIXED MULTILAYERS VIA GRAZING X-RAY REFLECTOMETRY

被引：28

作者：

LEBOITE, MG ^{[1
]}

TRAVERSE, A ^{[1
]}

NEVOT, L ^{[1
]}

PARDO, B ^{[1
]}

CORNO, J ^{[1
]}

机构：

[1] INST OPT,F-91406 ORSAY,FRANCE

来源：

JOURNAL OF MATERIALS RESEARCH | 1988年 / 3卷 / 06期

关键词：

Ion Beams--Applications - Nickel and Alloys--Mixing - Nickel Platinum Alloys--Thin Films - Reflectometers;

D O I：

10.1557/JMR.1988.1089

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The grazing x-ray reflectometry technique was used as a way to study modifications in metallic multilayers induced by ion-beam irradiation. Due to the high sensitivity of the technique, short-range atomic displacements of an atom A in a layer B can be detected so that the first stages of ion-beam mixing can be investigated. The rate of mixing is measured and the compound A1-xBx formed at the layers' interfaces is characterized.

引用

页码：1089 / 1096

页数：8

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