CHARACTERIZATION OF AMORPHOUS-CARBON FILMS BY C-13 CP MAS NMR-SPECTROSCOPY

被引:10
作者
BEAMSON, G
BRENNAN, WJ
CLAYDEN, NJ
JENNINGS, RCK
机构
[1] Ici, Wilton Materials Research Centre, Cleveland, TS8 6JE, P.O. Box No. 90, Wilton, Middlesbrough
关键词
PLASMA POLYMERS; CP MAS NMR; DIPOLAR DEPHASING EXPERIMENTS; LINESHAPE ANALYSIS;
D O I
10.1002/polb.1993.090310915
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
C-13 CP MAS NMR spectroscopy was used to characterize alpha-C:H materials generated from methane and hydrogen mixtures using a microwave plasma. Dipolar dephasing experiments indicate a range of T(dd) making quantification of quaternary ''diamond''-like carbons difficult. Unconstrained lineshape analysis is not suitable for the deconvolution of the NMR spectra, but linewidth constrained analyses gave reasonable results. (C) 1993 John Wiley & Sons, Inc.
引用
收藏
页码:1205 / 1211
页数:7
相关论文
共 18 条
[1]   LOW-PRESSURE, METASTABLE GROWTH OF DIAMOND AND DIAMONDLIKE PHASES [J].
ANGUS, JC ;
HAYMAN, CC .
SCIENCE, 1988, 241 (4868) :913-921
[2]  
ANGUS JC, 1986, PLASMA DEPOSITED THI
[3]  
[Anonymous], 1986, NUMERICAL RECIPES
[4]  
AXELSON DE, 1985, SOLID STATE NUCLEAR
[5]   MODIFICATION OF SURFACES AND SURFACE-LAYERS BY NON-EQUILIBRIUM PROCESSES [J].
BEAMSON, G ;
BRENNAN, WJ ;
CLARK, DT ;
HOWARD, J .
PHYSICA SCRIPTA, 1988, T23 :249-257
[6]   A C-13-NMR INVESTIGATION OF PLASMA POLYMERIZED ETHANE, ETHYLENE, AND ACETYLENE [J].
DILKS, A ;
KAPLAN, S ;
VANLAEKEN, A .
JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1981, 19 (11) :2987-2996
[7]   BONDING IN HYDROGENATED HARD CARBON STUDIED BY OPTICAL SPECTROSCOPY [J].
DISCHLER, B ;
BUBENZER, A ;
KOIDL, P .
SOLID STATE COMMUNICATIONS, 1983, 48 (02) :105-108
[8]   CHARACTERIZATION OF PLASMA POLYMERIZED HYDROCARBONS USING CP-MAS C-13-NMR [J].
GAMBOGI, RJ ;
CHO, DL ;
YASUDA, H ;
BLUM, FD .
JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1991, 29 (12) :1801-1805
[9]   INHOMOGENEOUS CARBON BONDING IN HYDROGENATED AMORPHOUS-CARBON FILMS [J].
GRILL, A ;
MEYERSON, BS ;
PATEL, VV ;
REIMER, JA ;
PETRICH, MA .
JOURNAL OF APPLIED PHYSICS, 1987, 61 (08) :2874-2877
[10]   DIRECT DETERMINATION OF CARBON HYBRIDIZATION IN AMORPHOUS-CARBON FILMS USING C-13 NMR-SPECTROSCOPY [J].
JARMAN, RH ;
RAY, GJ .
JOURNAL OF THE CHEMICAL SOCIETY-CHEMICAL COMMUNICATIONS, 1985, (17) :1153-1154