CHARACTERISTICS OF SILICON REMOVAL BY FINE FOCUSED GALLIUM ION-BEAM

[1] HEAVY-ION SPUTTERING YIELDS OF GOLD - FURTHER EVIDENCE OF NONLINEAR EFFECTS [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (06) : 2416 - 2422

[2] ISHITANI T, 1982, J VAC SCI TECHNOL, V19, P80

[3] ASYMMETRIC ELECTROSTATIC LENS FOR FIELD-EMISSION MICROPROBE APPLICATIONS [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (04) : 2494 - 2501

[1] HEAVY-ION SPUTTERING YIELDS OF GOLD - FURTHER EVIDENCE OF NONLINEAR EFFECTS [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (06) : 2416 - 2422

[2] ISHITANI T, 1982, J VAC SCI TECHNOL, V19, P80

[3] ASYMMETRIC ELECTROSTATIC LENS FOR FIELD-EMISSION MICROPROBE APPLICATIONS [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (04) : 2494 - 2501