BACKSCATTERING MEASUREMENTS AND SURFACE-ROUGHNESS

被引:17
作者
SCHMID, K [1 ]
RYSSEL, H [1 ]
机构
[1] TECH UNIV MUNICH,LEHRSTUHL INTEGRIERTE SCHALTUNGEN,ARCIS STR 21,8 MUNICH 2,WEST GERMANY
来源
NUCLEAR INSTRUMENTS & METHODS | 1974年 / 119卷 / 02期
关键词
D O I
10.1016/0029-554X(74)90766-6
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:287 / 289
页数:3
相关论文
共 4 条
[1]   DEFECT STUDIES IN CRYSTALS BY MEANS OF CHANNELING [J].
BOGH, E .
CANADIAN JOURNAL OF PHYSICS, 1968, 46 (06) :653-&
[2]  
Mayer J. W., 1970, ION IMPLANTATION SEM
[3]   MICROANALYSIS OF MATERIALS BY BACKSCATTERING SPECTROMETRY [J].
NICOLET, MA ;
MITCHELL, IV ;
MAYER, JW .
SCIENCE, 1972, 177 (4052) :841-&
[4]   UNIVERSAL GONIOMETER FOR CHANNELING EXPERIMENTS [J].
SCHMID, K ;
RYSSEL, H ;
MULLER, H .
NUCLEAR INSTRUMENTS & METHODS, 1972, 99 (01) :121-&