STRAIN ADJUSTMENT IN SI/SIGE SUPERLATTICES BY A SIGE ALLOY BUFFER LAYER

被引：10

作者：

HERZOG, HJ ^{[1
]}

JORKE, H ^{[1
]}

KASPER, E ^{[1
]}

MANTL, S ^{[1
]}

机构：

[1] FORSCHUNGSZENTRUM JULICH, INST FESTKORPERFORSCH, D-5170 JULICH 1, FED REP GER

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1989年 / 136卷 / 10期

关键词：

D O I：

10.1149/1.2096396

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：3026 / 3030

页数：5

共 17 条

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