TA ADDITIVE EFFECT ON RF MAGNETRON SPUTTERED COCR FILMS

被引：11

作者：

TAMAI, H

TAGAMI, K

HAYASHIDA, H

机构：

[1] NEC Corp, Kawasaki, Jpn

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1988年 / 24卷 / 06期

关键词：

D O I：

10.1109/20.92105

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：2347 / 2349

页数：3

共 14 条

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[3]

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[5] THE EFFECT OF TI UNDERLAYER ON MAGNETIC-PROPERTIES OF CO-CR THIN-FILMS [J].

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IEEE TRANSACTIONS ON MAGNETICS, 1987, 23 (05) :2797-2799

[6] WEAR-RESISTANCE, MECHANICAL STRENGTH AND MICROSTRUCTURE ON SPUTTERED COCR PERPENDICULAR MEDIA [J].

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IEEE TRANSACTIONS ON MAGNETICS, 1986, 22 (05) :346-348

[7] EFFECT OF ADDITIONAL ELEMENT (FE, ZR, TA) FOR CO-CR FILMS DEPOSITED BY TARGETS FACING TYPE OF SPUTTERING [J].

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[8] RECENT SUBJECTS AND PROGRESSES IN RESEARCH ON CO-CR PERPENDICULAR MAGNETIC RECORDING MEDIA [J].

OUCHI, K ;

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IEEE TRANSACTIONS ON MAGNETICS, 1987, 23 (05) :2443-2448

[9] FILM STRUCTURE AND MAGNETIC-PROPERTIES FOR CO-CR SPUTTERED FILMS [J].

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SUZUKI, T .

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[10]

TADOKORO S, 1987, 11TH ANN C MAG, V190

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