EFFECTS OF IMPURITY GASES ON PROPERTIES OF CO-CR PERPENDICULAR RECORDING MEDIA IN HIGH-RATE AND CONTINUOUS SPUTTERING PROCESS

被引：15

作者：

IWASAKI, S

OUCHI, K

SAIKI, K

KIMURA, M

机构：

[1] Tohoku Univ, Sendai, Jpn, Tohoku Univ, Sendai, Jpn

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1986年 / 22卷 / 05期

关键词：

D O I：

10.1109/TMAG.1986.1064341

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

COBALT CHROMIUM ALLOYS

引用

页码：1158 / 1160

页数：3

共 10 条

[1] NITROGEN-INDUCED FCC PHASE IN RF SPUTTERED CO-CR FILMS HAVING THE HCP PHASE AND PERPENDICULAR MAGNETIC-ANISOTROPY [J].

COUGHLIN, TM ;

WUORI, ER ;

JUDY, JH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (02) :171-174

[2] OXIDATION EFFECTS ON MAGNETIC-PROPERTIES IN COCR SPUTTERED FILMS [J].

HONDA, S ;

YAMASHITA, N ;

OHKOSHI, M ;

KUSUDA, T .

IEEE TRANSACTIONS ON MAGNETICS, 1984, 20 (05) :791-793

[3]

IWASAKI S, 1986, UNPUB J MAGNETICS SO

[4]

JHINGAN AK, 1984, IEEE T MAGN, V20, P779, DOI 10.1109/TMAG.1984.1063378

[5]

JHINGAN KA, 1985, J APPL PHYS, V57, P3991

[6]

KOBAYASHI H, 1984, JARECT, V15, P67

[7]

Matsuoka M., 1984, Transactions of the Institute of Electronics and Communication Engineers of Japan, Part C, VJ67C, P254

[8] GT TARGET, A NEW HIGH-RATE SPUTTERING TARGET OF MAGNETIC-MATERIALS [J].

NAKAMURA, K ;

YAMADA, T ;

OHTA, Y ;

ITOH, A .

IEEE TRANSACTIONS ON MAGNETICS, 1982, 18 (06) :1080-1082

[9]

OUCHI K, 1982, P SENDAI S PERP MAGN, P131

[10] COMPARISON OF THE EFFECTS OF OXYGEN ON COBALT AND COBALT CHROMIUM THIN-FILMS [J].

THOMPSON, JA ;

STEVENSON, DA .

IEEE TRANSACTIONS ON MAGNETICS, 1985, 21 (05) :1441-1443

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