OXYGEN ON MO(110) - LOW-TEMPERATURE ADSORPTION AND HIGH-TEMPERATURE OXIDATION

被引:84
作者
COLAIANNI, ML
CHEN, JG
WEINBERG, WH
YATES, JT
机构
[1] EXXON RES & ENGN CO,CORP RES LABS,ANNANDALE,NJ 08801
[2] UNIV CALIF SANTA BARBARA,DEPT CHEM & NUCL ENGN,SANTA BARBARA,CA 93106
关键词
D O I
10.1016/0039-6028(92)90547-J
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
High-resolution electron energy loss spectroscopy (HREELS), Auger electron spectroscopy (AES) and thermal desorption mass spectrometry (TDS) have been used to study the low-temperature and high-temperature oxidation of a Mo(110) single crystal. Oxidized overlayers prepared at 90 and 1000 K were studied at temperatures up to 1400 K. A low-oxygen coverage on Mo(110) at 90 K produces only one vibrational loss at 530 cm-1, indicating dissociative oxygen adsorption into the long-bridge site on this surface. Upon increased exposure, oxygen undergoes conversion to a quasi-threefold adsorption site, causing two characteristic losses at 395 and 605 cm-1 to become spectroscopically visible. An additional loss at 990 cm-1 appears at saturation oxygen exposure. An overlayer prepared by exposure of Mo(110) at 90 K to a low coverage of oxygen followed by heating to 1200 K regenerates a ''clean'' surface, as observed in HREELS; this is caused by oxygen diffusion into the subsurface region. Heating an oxygen-saturated overlayer to 1200 K regenerates a vibrational spectrum that is similar to a low coverage of oxygen on Mo(110). Heavy oxidation of Mo(110) at 1000 K produces an oxide layer characterized by the appearance of a fourth vibrational mode at 740 cm-1 and a twofold increase in the O(KLL)/Mo(LMM) Auger peak-to-peak ratio. Heating this O/Mo(110) layer to 1400 K regenerates a surface that is similar to the oxidized molybdenum overlayer produced by a saturation-oxygen exposure at 90 K.
引用
收藏
页码:211 / 222
页数:12
相关论文
共 31 条
[2]   ADSORPTION OF OXYGEN ON AG(110) STUDIED BY HIGH-RESOLUTION ELS AND TPD [J].
BACKX, C ;
DEGROOT, CPM ;
BILOEN, P .
SURFACE SCIENCE, 1981, 104 (01) :300-317
[3]   THE ADSORPTION OF H2O ON FE (100) STUDIED BY EELS [J].
BARO, AM ;
ERLEY, W .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03) :580-583
[4]   ON THE ADSORPTION OF OXYGEN ON THE MO(110) SURFACE AND ITS VICINALS [J].
BAUER, E ;
POPPA, H .
SURFACE SCIENCE, 1983, 127 (02) :243-254
[5]   METHODS IN SEMICONDUCTOR SURFACE-CHEMISTRY [J].
BOZACK, MJ ;
MUEHLHOFF, L ;
RUSSELL, JN ;
CHOYKE, WJ ;
YATES, JT .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (01) :1-8
[6]  
BUCKLEY RI, 1985, COORDIN CHEM REV, V65, P167
[7]   DESIGN CONSIDERATIONS FOR SIMPLE GAS DOSERS IN SURFACE SCIENCE APPLICATIONS [J].
CAMPBELL, CT ;
VALONE, SM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (02) :408-411
[8]   THE ADSORPTION AND DISSOCIATION OF CARBON-MONOXIDE ON CLEAN AND OXYGEN-MODIFIED MO(110) SURFACES [J].
COLAIANNI, ML ;
CHEN, JG ;
WEINBERG, WH ;
YATES, JT .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1992, 114 (10) :3735-3743
[9]   SURFACE SENSITIVE SPECTROSCOPIC STUDY OF THE INTERACTION OF OXYGEN WITH A1(111) - LOW-TEMPERATURE CHEMISORPTION AND OXIDATION [J].
CROWELL, JE ;
CHEN, JG ;
YATES, JT .
SURFACE SCIENCE, 1986, 165 (01) :37-64
[10]  
DAVIS LE, 1972, HDB AUGER ELECTRON S, P31