A MODEL FOR STRESS-INDUCED METAL NOTCHING AND VOIDING IN VERY LARGE-SCALE-INTEGRATED AL-SI (1 PERCENT) METALLIZATION

被引：138

作者：

MCPHERSON, JW

DUNN, CF

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 05期

关键词：

D O I：

10.1116/1.583609

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1321 / 1325

页数：5

共 12 条

[1] Curry J., 1984, 22nd Annual Proceedings on Reliability Physics 1984 (Catalog No. 84CH1990-1), P6, DOI 10.1109/IRPS.1984.362013
[2] AUGER-ELECTRON SPECTROSCOPY EVALUATION OF VOIDS IN ALUMINUM-1-PERCENT SILICON INTEGRATED-CIRCUIT METALLIZATION
GASSER, RA
JOHNSON, SG
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (03): : 758 - 761
[3] George E, 1976, DIETER MECH METALLUR, V2
[4] GROOTHUIS SK, 1987, 25TH P ANN IEEE IRPS
[5] Klema J., 1984, 22nd Annual Proceedings on Reliability Physics 1984 (Catalog No. 84CH1990-1), P1, DOI 10.1109/IRPS.1984.362012
[6] Koyama H., 1986, 24th Annual Proceedings Reliability Physics 1986 (Cat. No.86CH2256-6), P24, DOI 10.1109/IRPS.1986.362107
[7] McPherson J. W., 1986, 24th Annual Proceedings Reliability Physics 1986 (Cat. No.86CH2256-6), P12, DOI 10.1109/IRPS.1986.362105
[8] O'Donnell S. J., 1984, 22nd Annual Proceedings on Reliability Physics 1984 (Catalog No. 84CH1990-1), P9, DOI 10.1109/IRPS.1984.362014
[9] REEDHILL RE, 1973, PHYSICAL METALLURGY
[10] TU KN, 1982, TREATISE MATERIALS S, V24, P185