AUGER-ELECTRON SPECTROSCOPY EVALUATION OF VOIDS IN ALUMINUM-1-PERCENT SILICON INTEGRATED-CIRCUIT METALLIZATION

被引：6

作者：

GASSER, RA

JOHNSON, SG

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1986年 / 4卷 / 03期

关键词：

D O I：

10.1116/1.583561

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：758 / 761

页数：4

共 10 条

[1] BUJOR M, 1982, J VAC SCI TECHNOL, V20, P397
[2] CLASS WH, 1979, SOLID STATE TECHNOL, V22, P61
[3] Curry J., 1984, 22nd Annual Proceedings on Reliability Physics 1984 (Catalog No. 84CH1990-1), P6, DOI 10.1109/IRPS.1984.362013
[4] THE OXIDATION OF ALUMINIUM IN DRY AND HUMID OXYGEN ATMOSPHERES
HART, RK
[J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1956, 236 (1204): : 68 - 88
[5] NATURAL AND THERMALLY FORMED OXIDE FILMS ON ALUMINUM
HUNTER, MS
FOWLE, P
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1956, 103 (09) : 482 - 485
[6] Klema J., 1984, 22nd Annual Proceedings on Reliability Physics 1984 (Catalog No. 84CH1990-1), P1, DOI 10.1109/IRPS.1984.362012
[7] STUDY OF ADSORPTION PHENOMENA ON ALUMINUM BY INTER-ATOMIC AUGER TRANSITION SPECTROSCOPY .1. INITIAL OXIDATION OF A1
KOBAYASHI, KLI
SHIRAKI, Y
KATAYAMA, Y
[J]. SURFACE SCIENCE, 1978, 77 (03) : 449 - 457
[8] INFLUENCE OF RESIDUAL GASES ON THE PROPERTIES OF DC MAGNETRON-SPUTTERED ALUMINUM-SILICON
NOWICKI, RS
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01): : 384 - 387
[9] ATTENUATION LENGTHS OF LOW-ENERGY ELECTRONS IN SOLIDS
POWELL, CJ
[J]. SURFACE SCIENCE, 1974, 44 (01) : 29 - 46
[10] SERVI IS, 1951, T AM I MIN MET ENG, V191, P909