A STUDY OF DEFECTS IN AMORPHOUS-SILICON FILMS

被引:52
作者
DANNEFAER, S [1 ]
KERR, D [1 ]
HOGG, BG [1 ]
机构
[1] AARHUS UNIV,INST PHYS,DK-8000 AARHUS C,DENMARK
关键词
D O I
10.1063/1.331724
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:155 / 160
页数:6
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