MEASUREMENT OF IONIZATION AND ATTACHMENT COEFFICIENTS IN SF6 AND SF6 + N2

被引：31

作者：

RAJU, GRG

DINCER, MS

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 12期

关键词：

D O I：

10.1063/1.330502

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：8562 / 8567

页数：6

共 18 条

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[10] MEASUREMENT OF THE EFFECTIVE IONIZATION COEFFICIENT AND THE STATIC BREAKDOWN VOLTAGE IN SF6 AND NITROGEN MIXTURES [J].

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