MEASUREMENT OF IONIZATION AND ATTACHMENT COEFFICIENTS IN SF6 AND SF6 + N2

被引：31

作者：

RAJU, GRG

DINCER, MS

机构：

来源：

关键词：

D O I：

10.1063/1.330502

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：8562 / 8567

页数：6

共 18 条

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CHANTRY, PJ .

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[16] BREAKDOWN FIELD-STRENGTH OF SF6, N2O,SF6 + N-2, AND SF6 + N2O [J].

RAJU, GRG ;

HACKAM, R .

SUKHUM, N .

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[18]

TEICH TH, 1981, ELECTRON ION SWARMS, P241