THE EFFECT OF EXCITATION-FREQUENCY ON EMISSION-SPECTRA OF POLYMERIZATION PLASMAS

被引：7

作者：

LOPATA, E

COUNTRYWOOD, J

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 05期

关键词：

D O I：

10.1116/1.575457

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2949 / 2952

页数：4

共 11 条

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[10] COMPARISON OF MICROWAVE AND LOWER FREQUENCY PLASMAS FOR THIN-FILM DEPOSITION AND ETCHING [J].

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