GROWTH OF AL AND AL NITRIDE FILMS IN N2-NE AND N2-(NE+AR) DISCHARGES - CONSTRUCTION OF A TERNARY GAS-PHASE DIAGRAM

被引：19

作者：

SIETTMANN, JR ^{[1
]}

AITA, CR ^{[1
]}

机构：

[1] UNIV WISCONSIN,SURFACE STUDIES LAB,MILWAUKEE,WI 53201

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期

关键词：

D O I：

10.1116/1.575276

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1712 / 1716

页数：5

共 14 条

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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (02): : 162 - 170
[8] MOSS TS, 1961, OPTICAL PROPERTIES S, P38
[9] About the Increase of the Ignition voltage of Neon-Argon-Mixtures by Irradiation.
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