PREPARATION AND ANALYSIS OF REACTIVELY EVAPORATED A-SI-H

[1] COMPARATIVE-STUDY OF HYDROGEN EVOLUTION FROM AMORPHOUS HYDROGENATED SILICON FILMS [J]. THIN SOLID FILMS, 1982, 90 (02) : 145 - 152

[2] CRASSO V, 1982, SOLID STATE COMMUN, V41, P675

[3] INFRARED VIBRATIONAL-SPECTRA OF RF-SPUTTERED HYDROGENATED AMORPHOUS SILICON [J]. PHYSICAL REVIEW B, 1978, 18 (08): : 4288 - 4300

[4] MATSUDA A, 1981, AIP C P, V73, P192

[5] OKAMOTO H, 1979, 8TH P INT C AM LIQ S, P201

[6] GLOW-DISCHARGE PREPARATION OF AMORPHOUS HYDROGENATED SILICON FROM HIGHER SILANES [J]. APPLIED PHYSICS LETTERS, 1980, 37 (08) : 725 - 727

[1] COMPARATIVE-STUDY OF HYDROGEN EVOLUTION FROM AMORPHOUS HYDROGENATED SILICON FILMS [J]. THIN SOLID FILMS, 1982, 90 (02) : 145 - 152

[2] CRASSO V, 1982, SOLID STATE COMMUN, V41, P675

[3] INFRARED VIBRATIONAL-SPECTRA OF RF-SPUTTERED HYDROGENATED AMORPHOUS SILICON [J]. PHYSICAL REVIEW B, 1978, 18 (08): : 4288 - 4300

[4] MATSUDA A, 1981, AIP C P, V73, P192

[5] OKAMOTO H, 1979, 8TH P INT C AM LIQ S, P201

[6] GLOW-DISCHARGE PREPARATION OF AMORPHOUS HYDROGENATED SILICON FROM HIGHER SILANES [J]. APPLIED PHYSICS LETTERS, 1980, 37 (08) : 725 - 727