PRODUCTION MECHANISM AND REACTIVITY OF THE SIH RADICAL IN A SILANE PLASMA

被引：108

作者：

SCHMITT, JPM

GRESSIER, P

KRISHNAN, M

DEROSNY, G

PERRIN, J

机构：

来源：

CHEMICAL PHYSICS | 1984年 / 84卷 / 02期

关键词：

D O I：

10.1016/0301-0104(84)85213-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：281 / 293

页数：13

相关论文

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