LASER WRITING ON METAL-SILICON BILAYERS FOR OPTICAL STORAGE .1. OPTICAL-PROPERTIES

被引：13

作者：

AHN, KY

DISTEFANO, TH

MAZZEO, NJ

HERD, SR

TU, KN

机构：

来源：

关键词：

D O I：

10.1063/1.331118

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3777 / 3783

页数：7

共 5 条

[1] OBSERVATIONS OF STRESSES IN THIN-FILMS OF PALLADIUM AND PLATINUM SILICIDES ON SILICON
ANGILELLO, J
HEURLE, FD
PETERSON, S
SEGMULLER, A
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (01): : 471 - 475
[2] HERD SR, 1982, J APPL PHYS, V53
[3] BIT ORIENTED OPTICAL STORAGE WITH THIN TELLURIUM-FILMS
LOU, DY
BLOM, GM
KENNEY, GC
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (01): : 78 - 86
[4] PERRY PB, 1980, OPT COMMUN, V37, P1
[5] SILICIDE FILMS FOR ARCHIVAL OPTICAL STORAGE
TU, KN
AHN, KY
HERD, SR
[J]. APPLIED PHYSICS LETTERS, 1981, 39 (11) : 927 - 929