ION-BEAM IRRADIATED VIA-CONNECT THROUGH AN INSULATING POLYMER LAYER

被引：9

作者：

VENKATESAN, T

FELDMAN, M

WILKENS, BJ

WILLENBROCK, WE

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 04期

关键词：

D O I：

10.1063/1.333164

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1212 / 1214

页数：3

共 7 条

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[2] LARGE CONDUCTIVITY CHANGES IN ION-BEAM IRRADIATED ORGANIC THIN-FILMS [J].

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KAPLAN, ML ;

SCHMIDT, PH ;

VENKATESAN, T ;

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[3] LASER-FORMED CONNECTIONS USING POLYIMIDE [J].

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FREIDIN, JF ;

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APPLIED PHYSICS LETTERS, 1983, 42 (08) :705-706

[4] PULSED ION-BEAM TECHNIQUE FOR MEASURING DIFFUSION-COEFFICIENT OF A SLOW DIFFUSANT IN POLYMERS [J].

VENKATESAN, T ;

EDELSON, D ;

BROWN, WL .

APPLIED PHYSICS LETTERS, 1983, 43 (04) :364-366

[5] ION-BEAM-INDUCED CONDUCTIVITY IN POLYMER-FILMS [J].

VENKATESAN, T ;

FORREST, SR ;

KAPLAN, ML ;

MURRAY, CA ;

SCHMIDT, PH ;

WILKENS, BJ .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (06) :3150-3153

[6]

VENKATESAN T, 1983, UNPUB 2ND P INT C RA

[7]

1982, UNPUB 1ST P INT TECH

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