ELECTRICAL CHARACTERIZATION OF METAL-INAS CONTACTS

被引:17
作者
MILLEA, MF [1 ]
MCCOLL, M [1 ]
SILVER, AH [1 ]
机构
[1] AEROSP CORP,EL SEGUNDO,CA 90245
关键词
D O I
10.1007/BF02663275
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:321 / 340
页数:20
相关论文
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