A 3-DIMENSIONAL PHOTORESIST IMAGE SIMULATOR - TRIPS-I

被引：13

作者：

MATSUZAWA, T ^{[1
]}

ITO, T ^{[1
]}

TANUMA, M ^{[1
]}

HASEGAWA, N ^{[1
]}

SUNAMI, H ^{[1
]}

机构：

[1] HITACHI LTD,HITACHI RES LAB,HITACHI,IBARAKI 31912,JAPAN

来源：

IEEE ELECTRON DEVICE LETTERS | 1985年 / 6卷 / 08期

关键词：

D O I：

10.1109/EDL.1985.26175

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：416 / 418

页数：3

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[4] PARTIALLY COHERENT IMAGING IN 2 DIMENSIONS AND THE THEORETICAL LIMITS OF PROJECTION PRINTING IN MICROFABRICATION
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