NODULAR GROWTH IN THICK-SPUTTERED METALLIC COATINGS

被引：67

作者：

SPALVINS, T ^{[1
]}

BRAINARD, WA ^{[1
]}

机构：

[1] NASA,LEWIS RES CTR,CLEVELAND,OH 44135

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1974年 / 11卷 / 06期

关键词：

D O I：

10.1116/1.1318706

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1186 / 1192

页数：7

共 10 条

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AYCOCK, TL
HUIE, NC
KRAUSS, G
[J]. METALLURGICAL TRANSACTIONS, 1974, 5 (05): : 1215 - 1223
[2] BUNSHAH RF, 1966, T VACUUM METALLURGIC
[3] Gabe D.R., 1973, METALL MATER TECHNOL, V5, P72
[4] HUGHES JL, 1974, MET ENG QUART, V14, P1
[5] STRUCTURE MODIFICATION BY ION-BOMBARDMENT DURING DEPOSITION
MATTOX, DM
KOMINIAK, GJ
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (01): : 528 - &
[6] Neugebauer C. A., 1970, HDB THIN FILM TECHNO
[7] SPALVINS T, 1971, ASLE SP3, P360
[8] SPALVINS T, 1972, ASME72DE37 PAP
[9] SPALVINS T, UNPUBLISHED
[10] THORNTON JA, 1973, SAE730544 PAP