ULTRAVIOLET-SPECTRA OF II-VI ORGANOMETALLIC COMPOUNDS AND THEIR APPLICATION TO INSITU MEASUREMENTS OF THE PHOTOLYSIS IN A METALORGANIC CHEMICAL VAPOR-DEPOSITION REACTOR

被引：24

作者：

FUJITA, Y

FUJII, S

IUCHI, T

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 02期

关键词：

D O I：

10.1116/1.576111

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：276 / 280

页数：5

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