RBS AND NUCLEAR-REACTION ANALYSIS OF BORON IMPLANTED COPPER

被引：12

作者：

HENRIKSEN, O

LAURSEN, T

JOHNSON, E

JOHANSEN, A

SARHOLTKRISTENSEN, L

WHITTON, JL

机构：

来源：

关键词：

D O I：

10.1016/0168-583X(86)90321-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：356 / 360

页数：5

共 20 条

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[10] A STUDY OF SHALLOW AND DEEP DAMAGE IN CU AFTER IMPLANTATION OF 100 KEV CU AND AG IONS
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[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY): : 963 - 967