A STUDY OF SHALLOW AND DEEP DAMAGE IN CU AFTER IMPLANTATION OF 100 KEV CU AND AG IONS

被引：3

作者：

LINDGREEN, RJT

BOERMA, DO

DEHOSSON, JTM

机构：

[1] UNIV GRONINGEN,CTR MAT SCI,9718 CM GRONINGEN,NETHERLANDS

[2] STATE UNIV GRONINGEN,CTR MAT SCI,9747 AG GRONINGEN,NETHERLANDS

[3] STATE UNIV GRONINGEN,DEPT APPL PHYS,9747 AG GRONINGEN,NETHERLANDS

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 209卷 / MAY期

关键词：

D O I：

10.1016/0167-5087(83)90906-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：963 / 967

页数：5

共 14 条

[1] BOGH E, 1967, CAN J PHYS, V46, P753
[2] LATTICE THEORY OF POINT-DEFECTS
DEDERICHS, PH
LEHMANN, C
SCHOBER, HR
SCHOLZ, A
ZELLER, R
[J]. JOURNAL OF NUCLEAR MATERIALS, 1978, 69-7 (1-2) : 176 - 199
[3] LINDGREEN RJT, RAD EFFECTS
[4] Morgan D. V., 1970, Atomic collision phenomena in solids, P476
[5] DECHANNELING BY DISLOCATIONS IN ION-IMPLANTED AL
PICRAUX, ST
RIMINI, E
FOTI, G
CAMPISANO, SU
[J]. PHYSICAL REVIEW B, 1978, 18 (05): : 2078 - 2096
[6] QUERE Y, 1970, ANN PHYS-PARIS, V5, P105
[7] DECHANNELLING CYLINDER OF DISLOCATIONS
QUERE, Y
[J]. PHYSICA STATUS SOLIDI, 1968, 30 (02): : 713 - &
[8] RIMINI E, 1976, ION BEAM SURFACE LAY, V2, P597
[9] COMPUTER-SIMULATION OF ATOMIC-DISPLACEMENT CASCADES IN SOLIDS IN BINARY-COLLISION APPROXIMATION
ROBINSON, MT
TORRENS, IM
[J]. PHYSICAL REVIEW B, 1974, 9 (12): : 5008 - 5024
[10] SELF-INTERSTITIAL ATOMS IN METALS
SCHILLING, W
[J]. JOURNAL OF NUCLEAR MATERIALS, 1978, 69-7 (1-2) : 465 - 489