A STUDY OF SHALLOW AND DEEP DAMAGE IN CU AFTER IMPLANTATION OF 100 KEV CU AND AG IONS

被引:3
作者
LINDGREEN, RJT
BOERMA, DO
DEHOSSON, JTM
机构
[1] UNIV GRONINGEN,CTR MAT SCI,9718 CM GRONINGEN,NETHERLANDS
[2] STATE UNIV GRONINGEN,CTR MAT SCI,9747 AG GRONINGEN,NETHERLANDS
[3] STATE UNIV GRONINGEN,DEPT APPL PHYS,9747 AG GRONINGEN,NETHERLANDS
来源
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 209卷 / MAY期
关键词
D O I
10.1016/0167-5087(83)90906-7
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:963 / 967
页数:5
相关论文
共 14 条
  • [1] BOGH E, 1967, CAN J PHYS, V46, P753
  • [2] LATTICE THEORY OF POINT-DEFECTS
    DEDERICHS, PH
    LEHMANN, C
    SCHOBER, HR
    SCHOLZ, A
    ZELLER, R
    [J]. JOURNAL OF NUCLEAR MATERIALS, 1978, 69-7 (1-2) : 176 - 199
  • [3] LINDGREEN RJT, RAD EFFECTS
  • [4] Morgan D. V., 1970, Atomic collision phenomena in solids, P476
  • [5] DECHANNELING BY DISLOCATIONS IN ION-IMPLANTED AL
    PICRAUX, ST
    RIMINI, E
    FOTI, G
    CAMPISANO, SU
    [J]. PHYSICAL REVIEW B, 1978, 18 (05): : 2078 - 2096
  • [6] QUERE Y, 1970, ANN PHYS-PARIS, V5, P105
  • [7] DECHANNELLING CYLINDER OF DISLOCATIONS
    QUERE, Y
    [J]. PHYSICA STATUS SOLIDI, 1968, 30 (02): : 713 - &
  • [8] RIMINI E, 1976, ION BEAM SURFACE LAY, V2, P597
  • [9] COMPUTER-SIMULATION OF ATOMIC-DISPLACEMENT CASCADES IN SOLIDS IN BINARY-COLLISION APPROXIMATION
    ROBINSON, MT
    TORRENS, IM
    [J]. PHYSICAL REVIEW B, 1974, 9 (12): : 5008 - 5024
  • [10] SELF-INTERSTITIAL ATOMS IN METALS
    SCHILLING, W
    [J]. JOURNAL OF NUCLEAR MATERIALS, 1978, 69-7 (1-2) : 465 - 489