MEASUREMENT OF THE IONIZATION AND ATTACHMENT COEFFICIENTS IN MONOSILANE AND DISILANE

被引：22

作者：

SHIMOZUMA, M ^{[1
]}

TAGASHIRA, H ^{[1
]}

机构：

[1] HOKKAIDO UNIV,DEPT ELECT ENGN,SAPPORO,HOKKAIDO 060,JAPAN

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1986年 / 19卷 / 09期

关键词：

D O I：

10.1088/0022-3727/19/9/002

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L179 / L182

页数：4

共 11 条

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[3] BOLTZMANN-EQUATION ANALYSIS OF ELECTRON SWARM BEHAVIOR IN METHANE [J].

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[4] BOLTZMANN-EQUATION ANALYSIS OF ELECTRON SWARM BEHAVIOR IN MONOSILANE [J].

OHMORI, Y ;

SHIMOZUMA, M ;

TAGASHIRA, H .

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[5]

PEARSON JS, 1969, BR J APPL PHYS D, V2, P77

[6] DISSOCIATION CROSS-SECTIONS OF SILANE AND DISILANE BY ELECTRON-IMPACT [J].

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HUC, J ;

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[7] MEASUREMENT OF THE IONIZATION COEFFICIENTS IN NITROGEN AND METHANE MIXTURES [J].

SHIMOZUMA, M ;

TAGASHIRA, H .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1981, 14 (10) :1783-1789

[8] MEASUREMENT OF THE IONIZATION AND ATTACHMENT COEFFICIENTS IN SF6 AND HELIUM MIXTURES [J].

SHIMOZUMA, M ;

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JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1983, 16 (07) :1283-1291

[9] PREBREAKDOWN CURRENT GROWTH AND IONIZATION COEFFICIENTS IN HYDROGEN [J].

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[10]

TAGASHIRA H, 1985, 7TH P INT S PLASM CH, P1337

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