STABILIZATION OF TETRAGONAL ZRO2 WITH AL2O3 IN REACTIVE MAGNETRON SPUTTERED THIN-FILMS

被引：24

作者：

GILMORE, CM ^{[1
]}

QUINN, C ^{[1
]}

QADRI, SB ^{[1
]}

GOSSETT, CR ^{[1
]}

SKELTON, EF ^{[1
]}

机构：

[1] USN,RES LAB,DIV CONDENSED MATTER & RADIAT SCI,WASHINGTON,DC 20375

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574925

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2085 / 2087

页数：3

共 9 条

[1] Cevales G, 1968, BER DEUT KERAM GES, V45, P217
[2] CEVALES G, 1975, PHASE DIAGRAMS CERAM, P135
[3] STABILIZED ZIRCONIA ALUMINA THIN-FILMS
GILMORE, CM
QUINN, C
SKELTON, EF
GOSSETT, CR
QADRI, SB
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06): : 2598 - 2600
[4] GOSSETT CR, 1980, NUCL INSTRUM METHODS, V168, P151, DOI 10.1016/0029-554X(80)91245-8
[5] TRANSFORMATION TOUGHENING .4. FABRICATION, FRACTURE-TOUGHNESS AND STRENGTH OF AL2O3-ZRO2 COMPOSITES
LANGE, FF
[J]. JOURNAL OF MATERIALS SCIENCE, 1982, 17 (01) : 247 - 254
[6] LANGE FF, 1982, J MATER SCI, V17, P225, DOI 10.1007/BF00809057
[7] LEVIN EM, 1975, PHASE DIAGRAMS CERAM, P76
[8] AXIAL THERMAL EXPANSION OF ZRO2 AND HFO2 IN RANGE ROOM TEMPERATURE TO 1400 DEGREES C
PATIL, RN
SUBBARAO, EC
[J]. JOURNAL OF APPLIED CRYSTALLOGRAPHY, 1969, 2 : 281 - +
[9] Stewart G. H., 1967, SCI CERAM, V3, P339