APPLICATION OF PYROSOL DEPOSITION PROCESS FOR LARGE-AREA DEPOSITION OF FLUORINE-DOPED TIN DIOXIDE THIN-FILMS

被引：23

作者：

DUTTA, J

ROUBEAU, P

EMERAUD, T

LAURENT, JM

SMITH, A

LEBLANC, F

PERRIN, J

机构：

[1] SOLEMS SA,F-92194 PALAISEAU,FRANCE

[2] ECOLE NATL SUPER CERAM IND,MAT CERAM & TRAITMENT SURFACES LAB,CNRS,URA 320,F-87065 LIMOGES,FRANCE

[3] ECOLE POLYTECH,PHYS INTERFACES & COUCHES MINCES LAB,CNRS,UPR AO 250,F-91128 PALAISEAU,FRANCE

来源：

THIN SOLID FILMS | 1994年 / 239卷 / 01期

关键词：

D O I：

10.1016/0040-6090(94)90122-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We report on a pyrosol deposition process used for depositing on large-area (up to 100 cm long and 30 cm wide) soda-lime glass substrates of varying thicknesses (between 0.3 and 6 mm). Fluorine-doped tin oxide (SnO2:F) films were deposited on glass coated with a diffusion barrier of Al2O3. The film deposition was homogeneous and film properties were similar to those reported for films deposited by chemical vapour deposition. A minimum resistivity of 5 x 10(-4) Omega cm, carrier mobility of 20 cm(2) V(-1)s(-1) and optical transmission >80% for typical SnO2:F films 3000 Angstrom thick were achieved. Micrographs obtained by scanning electron microscopy of some typical films presented here demonstrate fairly good crystalline structure.

引用

页码：150 / 155

页数：6

共 14 条

[11] SPRAYED FILMS OF INDIUM TIN OXIDE AND FLUORINE-DOPED TIN OXIDE OF LARGE SURFACE-AREA
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[12] RAABE OG, 1976, FINE PARTICLES, P57
[13] GROWTH AND CHARACTERIZATION OF TIN OXIDE-FILMS PREPARED BY CHEMICAL VAPOR-DEPOSITION
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[J]. THIN SOLID FILMS, 1990, 190 (02) : 287 - 301
[14] ELECTRICAL AND OPTICAL-PROPERTIES OF TIN OXIDE-FILMS DOPED WITH F AND (SB+F)
SHANTHI, E
BANERJEE, A
DUTTA, V
CHOPRA, KL
[J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (03) : 1615 - 1621

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