THE REFRACTIVE-INDEX DISTRIBUTION N(C)(Z) OF ION-IMPLANTED KNBO3 WAVE-GUIDES

被引：10

作者：

SOLCIA, C

FLUCK, D

PLISKA, T

GUNTER, P

BAUER, S

FLEUSTER, M

BECKERS, L

BUCHAL, C

机构：

[1] FORSCHUNGSZENTRUM JULICH, FORSCHUNGSZENTRUM, INST SCHICHT & IONENTECH, D-52425 JULICH, GERMANY

[2] UNIV PAVIA, DEPT ELECTR, I-27100 PAVIA, ITALY

来源：

OPTICS COMMUNICATIONS | 1995年 / 120卷 / 1-2期

关键词：

D O I：

10.1016/0030-4018(95)00404-V

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We have analysed by means of dark and bright light spectroscopy the c-polarised mode spectra of KNbO3 planar wave,guides. These waveguides were fabricated by He+ ion implantation with ion doses from 2.5 X 10(14) to 3 X 10(15) cm(-2) and ion energies from 1 to 2.9 MeV. A quantitative model is derived to correlate the index profile of n(c) with the implantation parameters. The results are in excellent agreement with profiles observed by measuring the surface reflectivity of wedge polished samples. The test of the mode spectra after partial surface stripping by ion sputtering does not evidence irregular structures in the index profile.

引用

页码：39 / 46

页数：8

共 21 条

[11] COMPLEX-REFRACTIVE-INDEX PROFILES OF 4-MEV GE ION-IRRADIATION DAMAGE IN SILICON [J].