SHAPE CHANGES OF VOIDS IN BAMBOO LINES - A NEW ELECTROMIGRATION FAILURE-MECHANISM

被引：11

作者：

KRAFT, O ^{[1
]}

MOCKL, UE ^{[1
]}

ARZT, E ^{[1
]}

机构：

[1] UNIV STUTTGART,INST METALLKUNDE,D-70174 STUTTGART,GERMANY

来源：

QUALITY AND RELIABILITY ENGINEERING INTERNATIONAL | 1995年 / 11卷 / 04期

关键词：

METALLIZATION; ELECTROMIGRATION; VOIDING;

D O I：

10.1002/qre.4680110412

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The behaviour of electromigration-induced voids in narrow, unpassivated aluminium interconnects is examined. Failure voids are categorized in two different types: extended wedge-shaped voids and narrow slit-like voids. The occurrence of slits is found to increase with decreasing current density and line width. It is observed that shape changes of voids lead to the formation of the slit-like voids. These shape changes may consume a major part of the lifetime of a conductor line. A model to describe the evolution of the void shape is presented.

引用

页码：279 / 283

页数：5

共 18 条

[1] ELECTROMIGRATION FAILURE BY SHAPE CHANGE OF VOIDS IN BAMBOO LINES [J].

ARZT, E ;

KRAFT, O ;

NIX, WD ;

SANCHEZ, JE .

JOURNAL OF APPLIED PHYSICS, 1994, 76 (03) :1563-1571

[2]

ARZT E, 1992, MATER RES SOC SYMP P, V239, P677

[3] A MODEL FOR THE EFFECT OF LINE-WIDTH AND MECHANICAL STRENGTH ON ELECTROMIGRATION FAILURE OF INTERCONNECTS WITH NEAR-BAMBOO GRAIN STRUCTURES [J].

ARZT, E ;

NIX, WD .

JOURNAL OF MATERIALS RESEARCH, 1991, 6 (04) :731-736

[4]

ARZT E, 1994, MRS P, V338

[5]

ATAKOV EM, 1993, MATER RES SOC SYMP P, V309, P133, DOI 10.1557/PROC-309-133

[6] INSITU SCANNING ELECTRON-MICROSCOPY OBSERVATION OF THE DYNAMIC BEHAVIOR OF ELECTROMIGRATION VOIDS IN PASSIVATED ALUMINUM LINES [J].

BESSER, PR ;

MADDEN, MC ;

FLINN, PA .

JOURNAL OF APPLIED PHYSICS, 1992, 72 (08) :3792-3797

[7] INSITU OBSERVATIONS OF DC AND AC ELECTROMIGRATION IN PASSIVATED AL LINES [J].

CASTANO, E ;

MAIZ, J ;

FLINN, P ;

MADDEN, M .

APPLIED PHYSICS LETTERS, 1991, 59 (01) :129-131

[8] RELIABILITY AND MICROSTRUCTURE OF AL-SI-V-PD ALLOY-FILMS FOR USE IN ULTRALARGE SCALE INTEGRATION [J].

DIRKS, AG ;

AUGUR, RA .

APPLIED PHYSICS LETTERS, 1994, 64 (06) :704-706

[9]

HUMMEL RE, IN PRESS INT MATERIA

[10]

KRAFT O, 1993, MATER RES SOC SYMP P, V309, P199, DOI 10.1557/PROC-309-199

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