SYNTHESIS OF BN FILMS BY THE PLASMA CVD WITH VARIOUS SOLIDS - BH3NH3, H3BO3 AND NABH4

被引：37

作者：

SAITOH, H

HIROSE, T

MATSUI, H

HIROTSU, Y

ICHINOSE, Y

机构：

来源：

关键词：

D O I：

10.1016/0257-8972(89)90060-1

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：265 / 273

页数：9

共 10 条

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