DESORPTION-KINETICS OF HYDROGEN AND DEUTERIUM FROM SI(111) 7X7 STUDIED USING LASER-INDUCED THERMAL-DESORPTION

被引:223
作者
KOEHLER, BG
MAK, CH
ARTHUR, DA
COON, PA
GEORGE, SM
机构
关键词
D O I
10.1063/1.455117
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:1709 / 1718
页数:10
相关论文
共 70 条
[1]   TEMPERATURE-DEPENDENCE OF THE GROWTH-RATE OF SILICON PREPARED THROUGH CHEMICAL VAPOR-DEPOSITION FROM SILANE [J].
BEERS, AM ;
BLOEM, J .
APPLIED PHYSICS LETTERS, 1982, 41 (02) :153-155
[2]  
Belyakov Yu. I., 1973, Soviet Physics - Solid State, V14, P2567
[3]   HYDROGEN EVOLUTION AND DEFECT CREATION IN AMORPHOUS SI-H ALLOYS [J].
BIEGELSEN, DK ;
STREET, RA ;
TSAI, CC ;
KNIGHTS, JC .
PHYSICAL REVIEW B, 1979, 20 (12) :4839-4846
[4]  
BINNIG G, 1985, SURF SCI, V157, pL373, DOI 10.1016/0039-6028(85)90666-1
[5]   ALKYL RADICAL INVOLVEMENT IN SILICON SURFACE-CHEMISTRY [J].
BOZACK, MJ ;
TAYLOR, PA ;
CHOYKE, WJ ;
YATES, JT .
SURFACE SCIENCE, 1987, 179 (01) :132-142
[6]   REACTION OF SI(100) WITH NH3 - RATE-LIMITING STEPS AND REACTIVITY ENHANCEMENT VIA ELECTRONIC EXCITATION [J].
BOZSO, F ;
AVOURIS, P .
PHYSICAL REVIEW LETTERS, 1986, 57 (09) :1185-1188
[7]   EFFECTS OF LASER-PULSE CHARACTERISTICS AND THERMAL-DESORPTION PARAMETERS ON LASER-INDUCED THERMAL-DESORPTION [J].
BRAND, JL ;
GEORGE, SM .
SURFACE SCIENCE, 1986, 167 (2-3) :341-362
[8]   SURFACE-DIFFUSION OF HYDROGEN ON SULFUR-COVERED RU(001) SURFACES STUDIED USING LASER-INDUCED THERMAL-DESORPTION [J].
BRAND, JL ;
DECKERT, AA ;
GEORGE, SM .
SURFACE SCIENCE, 1988, 194 (03) :457-474
[9]   ADSORPTION AND DESORPTION PROPERTIES OF HYDROGEN ON SILICON FILMS AND COMPARISON WITH SINGLE-CRYSTAL PROPERTIES [J].
BRZOSKA, KD ;
KLEINT, C .
THIN SOLID FILMS, 1976, 34 (01) :131-134
[10]   MONO-HYDRIDE AND DIHYDRIDE PHASES ON SILICON SURFACES - A COMPARATIVE-STUDY BY EELS AND UPS [J].
BUTZ, R ;
OELLIG, EM ;
IBACH, H ;
WAGNER, H .
SURFACE SCIENCE, 1984, 147 (2-3) :343-348