HYDROGEN EVOLUTION AND DEFECT CREATION IN AMORPHOUS SI-H ALLOYS

被引：225

作者：

BIEGELSEN, DK

STREET, RA

TSAI, CC

KNIGHTS, JC

机构：

[1] Xerox Palo Alto Research Center, Palo Alto, CA 94304

来源：

PHYSICAL REVIEW B | 1979年 / 20卷 / 12期

关键词：

D O I：

10.1103/PhysRevB.20.4839

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Changes in the composition and electronic properties of plasma-deposited a-Si: H after annealing at temperatures through 600°C are studied by ESR, luminescence, infrared spectroscopy and hydrogen evolution. The generation of paramagnetic defects in a-Si: H on annealing is found to depend only on the amount of hydrogen evolved. The relation of peaks in the hydrogen-evolution rate to specific local hydrogen-bonding environments is studied and shown to be dominated by the effects of diffusion and sample microstructure. © 1979 The American Physical Society.

引用

页码：4839 / 4846

页数：8

共 17 条

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[7] KNIGHTS JC, 1979, APPL PHYS LETT, V35, P242
[8] HYDROGEN EVOLUTION FROM PLASMA-DEPOSITED AMORPHOUS SILICON FILMS
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (02): : 302 - 304
[9] KINETICS OF DECOMPOSITION OF AMORPHOUS HYDROGENATED SILICON FILMS
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PETERSON, EM
[J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (08) : 5238 - 5241
[10] PANKOVE JI, 1977, 7TH P INT C AM LIQ S, P402

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