HYDROGEN EVOLUTION FROM PLASMA-DEPOSITED AMORPHOUS SILICON FILMS

被引：21

作者：

MATYSIK, KJ

MOGAB, CJ

BAGLEY, BG

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 02期

关键词：

D O I：

10.1116/1.569575

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：302 / 304

页数：3

共 12 条

[1] QUANTITATIVE-ANALYSIS OF HYDROGEN IN GLOW-DISCHARGE AMORPHOUS SILICON [J].

BRODSKY, MH ;

FRISCH, MA ;

ZIEGLER, JF ;

LANFORD, WA .

APPLIED PHYSICS LETTERS, 1977, 30 (11) :561-563

[2] AMORPHOUS SILICON SOLAR-CELL [J].

CARLSON, DE ;

WRONSKI, CR .

APPLIED PHYSICS LETTERS, 1976, 28 (11) :671-673

[3] PREPARATION AND PROPERTIES OF AMORPHOUS SILICON [J].

CHITTICK, RC ;

ALEXANDE.JH ;

STERLING, HF .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1969, 116 (01) :77-&

[4] SIMULTANEOUS DETERMINATION OF STRUCTURE, ABSOLUTE SURFACE COVERAGE, AND NUCLEATION KINETICS - CD ON GE(111) [J].

MATYSIK, KJ .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (09) :3826-3832

[5] COMBINED RHEED-MOLECULAR-BEAM STUDY OF ADSORPTION OF CD ON GE(111) [J].

MATYSIK, KJ .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (09) :3833-3836

[6]

MATYSIK KJ, UNPUBLISHED

[7]

MOGAB CJ, 1977, J ELECTROCHEM SOC, V124, P1262, DOI 10.1149/1.2133542

[8] EVIDENCE OF VOIDS WITHIN AS-DEPOSITED STRUCTURE OF GLASSY SILICON [J].

MOSS, SC ;

GRACZYK, JF .

PHYSICAL REVIEW LETTERS, 1969, 23 (20) :1167-&

[9]

Redhead P. A., 1962, VACUUM, V12, P203, DOI DOI 10.1016/0042-207X(62)90978-8

[10]

Reinberg A. R., 1973, US patent, Patent No. [3,757,733, 3757733]

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