ITERATIVE DETERMINATION OF OXIDE THICKNESS IN MOS STRUCTURES FROM ONE DC CURRENT VOLTAGE PAIR

被引:4
作者
CALLIGARO, RB
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D O I
10.1049/el:19840049
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:70 / 72
页数:3
相关论文
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GED, P ;
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[2]  
SCHMITTLANDSIED.D, 1983, THICKNESS DETERMINAT
[3]  
SODINI CG, IEEE IEDM 82, P103
[4]   ON TUNNELING IN METAL-OXIDE-SILICON STRUCTURES [J].
WEINBERG, ZA .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (07) :5052-5056